Determining allowable antenna area as function of total gate insulator area for soi technology
AssigneeInternational Business Machines Corporation
InventorsHenry A. Bonges, III, Terence B. Hook, William F. Pokorny, Jeffrey S. Zimmerman
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Abstract
A method is disclosed of determining allowable antenna limits for semiconductor-on-insulator (SOI) technology. In one embodiment, the method may include: determining antenna area on a gate; determining antenna area on a source/drain; determining a total gate insulator area between gate and source/drain nets; and calculating allowable antenna area as a function of the total gate insulator area between the nets such that a larger total antenna area is allowed for larger total gate insulator area between the nets.
Claims7
A method of determining allowable antenna limits for semiconductor-on-insulator (SOI) technology, the method comprising:
- determining antenna area on a gate;
- determining antenna area on a source/drain nets;
- determining a total gate insulator area between gate and source/drain nets;
- and
- calculating allowable antenna area as a function of the total gate insulator area between the nets such that a larger total antenna area is allowed for a larger total gate insulator area between the nets.
Dependencies are inferred from the claim text.