Automated scheduling of test wafer builds in a semiconductor manufacturing process flow

An integrated, automated semiconductor manufacturing environment, comprising:

• a process flow;
• an inventory of test wafers;
• and
• a programmed computing system capable of:
• managing the test wafer inventory;
• consuming test wafers from the inventory by an automate process flow;
• and
• distributing the consumed test wafers according to their level of usage after an evaluation thereof.

A program storage medium encoded with instructions that, when executed by a computing device, perform a method comprising:

• managing a test wafer inventory;
• consuming test wafers from the inventory by an automated process flow;
• and
• distributing the consumed test wafers according to their level of usage after an evaluation thereof.

An automated, computer-implemented method for use in semiconductor manufacturing, comprising:

• monitoring test wafer utilization in an automated process flow;
• maintaining an inventory of test wafers of a plurality of different types responsive to the monitored utilization;
• and
• managing the test wafer utilization of the test wafer inventory.

An apparatus, comprising:

• an automated process flow;
• a lot including at least one test wafer;
• a test wafer controller capable of:
• monitoring test wafer utilization in the automated process flow;
• maintaining an inventory of test wafers of a plurality of different types responsive to the monitored utilization;
• and
• managing the test wafer utilization of the test wafer inventory.

An automated, computer-implemented method for use in semiconductor manufacturing, comprising:

• kitting a lot of test wafers;
• instantiating a software-implemented test lot scheduling agent for the kitted lot, the agent being capable of:
• scheduling a build for the kitted lot;
• or
• scheduling the kitted lot as a resource for consumption in an automated process flow.

An apparatus, comprising:

• an automated process flow, including:
• a plurality of process tools;
• and
• a lot including at least one test wafer;
• and
• a computing system controlling the automated process flow, including:
• a software-implemented test lot scheduling agent capable of:
• scheduling a build for the lot on the process tools;
• and
• scheduling the lot as a resource for consumption by the process tools.

A program storage medium encoded with instructions that, when executed by a computing device, perform a method for use in semiconductor manufacturing, comprising:

• kitting a lot of test wafers;
• instantiating a software-implemented test lot scheduling agent for the kitted lot, the agent being capable of:
• scheduling a build for the kitted lot;
• or
• scheduling the kitted lot as a resource for consumption in an automated process flow.