Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same

A wafer edge grinding apparatus, comprising:

• a chuck configured to mount and rotate a wafer;
• a grinding wheel configured to grind an edge of the wafer, and including a round rough-grinding wheel, a notch rough-grinding wheel, a notch fine-grinding wheel and a round fine-grinding wheel, each having a groove;
• a grinding operation unit configured to mount and rotate the grinding wheel and move the grinding wheel to contact the groove of the grinding wheel with the edge of the wafer mounted on the chuck;
• a first truer having an edge of a cross-sectional shape corresponding to a cross-sectional shape of the groove of the notch fine-grinding wheel and configured to compensate the groove of the notch fine-grinding wheel;
• a second truer having an edge of a cross-sectional shape corresponding to a cross-sectional shape of the groove of the round fine-grinding wheel and configured to compensate the groove of the round fine-grinding wheel;
• and
• a truing operation unit configured to mount and rotate the first and second truers and move the first and second truers to contact the edges of the first and second truers with the groove of each grinding wheel on a level with the groove of each grinding wheel.