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US 2009/0156002 A1Published application
Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device
OwnerKeiji Fujita, Hisashi Kanekoinventors
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Abstract
A wafer is placed on a lower electrode disposed in a reaction chamber; process gas is introduced into the reaction chamber; a magnetic field is applied at a position spaced from a surface of the wafer to be processed; plasma is generated by applying a high-frequency voltage between the lower electrode and an upper electrode disposed to face the lower electrode; the magnetic field is removed after the plasma is stabilized; and the wafer is plasma-processed.
Claims20
A manufacturing method for semiconductor device comprising:
- placing a wafer on a lower electrode disposed in a reaction chamber;
- introducing process gas into the reaction chamber;
- applying a magnetic field at a position spaced from a surface of the wafer to be processed;
- generating plasma by applying a high-frequency voltage between the lower electrode and an upper electrode disposed to face the lower electrode;
- removing the magnetic field after the plasma is stabilized;
- and
- plasma-processing the wafer.
4 more elements
A manufacturing apparatus for semiconductor device for plasma-processing a wafer comprising:
- a reaction chamber for plasma-processing the wafer;
- an upper electrode and a lower electrode disposed in the reaction chamber, the lower electrode being disposed to face the upper electrode, the lower electrode having a placement surface to place the wafer;
- a high-frequency power supply for applying a high-frequency voltage between the upper electrode and the lower electrode;
- a magnetic field applying unit for applying a magnetic field at a position spaced from a surface of the wafer to be processed and a position closer to the upper electrode side between the upper electrode and the lower electrode;
- and
- a magnetic field control unit for controlling timing to apply a magnetic field applied by the magnetic field applying unit.
3 more elements
Dependencies are inferred from the claim text.