Method of isolating semiconductor laser diodes
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsYoun Joon SUNG, Su Hee CHAE
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Abstract
Provided is a method of isolating semiconductor laser diodes (LDs), the method including the steps of: preparing a substrate; forming a plurality of semiconductor LDs on the substrate, each semiconductor LD including an n-type semiconductor layer, an active layer, a p-type semiconductor layer, an n-electrode, a ridge portion, and a p-electrode, the ridge portion being formed by etching the p-type semiconductor layer such that a portion of the p-type semiconductor layer protrudes, the p-electrode being formed on the ridge portion; partially forming base cut lines on the surface of the substrate excluding the ridge portions; and isolating the semiconductor LDs into a bar shape along the base cut lines.
Claims11
A method of isolating semiconductor laser diodes (LDs), comprising the steps of:
- preparing a substrate;
- forming a plurality of semiconductor LDs on the substrate, each semiconductor LD including an n-type semiconductor layer, an active layer, a p-type semiconductor layer, an n-electrode, a ridge portion, and a p-electrode, the ridge portion being formed by etching the p-type semiconductor layer such that a portion of the p-type semiconductor layer protrudes, the p-electrode being formed on the ridge portion;
- partially forming base cut lines on the surface of the substrate excluding the ridge portions;
- and
- isolating the semiconductor LDs into a bar shape along the base cut lines.
A method of isolating semiconductor LDs, comprising the steps of:
- preparing a substrate;
- forming a plurality of semiconductor LDs with a ridge portion on the substrate;
- and
- partially forming base cut lines on the surface of the substrate excluding the ridge portions,
- wherein a cut region having the base cut lines formed on the surface of the substrate is three times longer than that of an uncut region where the base cut line is not formed.
Dependencies are inferred from the claim text.