Modular flow cell and adjustment system
AssigneeIntermolecular, Inc.
InventorsKurt Weiner, Aaron Francis, Ken Williams
Life of this patent
Estimating the term…
Abstract
A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.
Claims26
A modular dispense head, comprising:
- a first section configured to be attached to a plurality of facility process supplies for a semiconductor manufacturing operation;
- and
- a second section detachably affixed to the first section, a bottom surface of the second section configured to function as a top surface of a reaction chamber, the second section further configured to introduce a portion of the plurality of facility process supplies from the first section into the reaction chamber.
A modular processing head for a combinatorial processing system, comprising:
- an interface portion for a processing tool containing facilities that interface with supply sources consumed during combinatorial processing;
- and
- a processing portion detachably mounted to the interface portion that enables access for at least a portion of the supply sources to a reaction chamber defined below the processing portion, wherein the interface portion and the processing portion are each monolithic blocks.
A combinatorial processing system, comprising:
- a plurality of reaction chambers having sidewalls defining a reaction region, each of the plurality of reaction chambers is moveable;
- and
- a plurality of dispense heads configured to be partially inserted into a corresponding one of each of the plurality of reaction chambers, wherein each of the plurality of dispense heads include a facilities supply portion and a reactor portion detachably coupled to each other, and wherein a bottom surface of the second section is configured to function as a top surface of a reaction chamber encompassing the reaction region.
Dependencies are inferred from the claim text.