Method of manufacturing magnetic field detector
AssigneeElectronics and Telecommunications Research Institute
InventorsJeongdae SUH, Myungae CHUNG
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Abstract
Disclosed is a method of manufacturing a magnetic field detector having various structures that can be used as a high-density magnetic biosensor. An embodiment of the invention provides a method of manufacturing a magnetic field detector including a magnetoresistive element using a magnetic bead detecting thin film. The method includes: preparing a substrate; depositing the thin film on an upper surface of the substrate; and etching the thin film to form a ring-shaped magnetoresistive element.
Claims17
A method of manufacturing a magnetic field detector using a thin film for detecting magnetic beads, the method comprising:
- preparing a substrate;
- depositing the thin film on an upper surface of the substrate;
- and
- etching the thin film to form a ring-shaped magnetoresistive element.
Dependencies are inferred from the claim text.