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US 2009/0155729 A1Published application
Photoimageable Nozzle Members and Methods Relating Thereto
AssigneeLexmark International, Inc.
InventorsSean T. Weaver, Rich Wells
Life of this patent
Estimating the term…
Abstract
Nozzle members, such as for a micro-fluid ejection head, micro-fluid ejection heads, and a method for making the same. One such nozzle member includes a negative photoresist composition derived from a first di-functional epoxy compound, a relatively high molecular weight polyhydroxy ether, a photoacid generator devoid of aryl sulfonium salts, an adhesion enhancer, and an aliphatic ketone solvent. The nozzle member has a thickness ranging from about 10 microns to about 30 microns.
Claims9
1-9. (canceled)
A method for making an improved micro-fluid ejection head, the method comprising:
- applying a first negative photoresist layer adjacent a device surface of a substrate, wherein the first negative photoresist layer is derived from a composition comprising a multi-functional epoxy compound, a first di-functional epoxy compound, a photoacid generator devoid of aryl sulfonium salts, an adhesion enhancer, and an aryl ketone solvent;
- imaging a plurality of flow features in the first photoresist layer;
- developing the imaged first photoresist layer to provide the plurality of flow features therein and a substantially planar thick film layer surface;
- applying a second negative photoresist layer adjacent the thick film layer, the second negative photoresist layer having a thickness ranging from about 10 to about 30 microns and being derived from a second photoresist formulation comprising a second di-functional epoxy compound, a relatively high molecular weight polyhydroxy ether, the photoacid generator devoid of aryl sulfonium salts, the adhesion enhancer, and an aliphatic ketone solvent;
- imaging a plurality of nozzles in the second photoresist layer;
- and
- developing the imaged second photorsist layer to provide a photoresist nozzle member adjacent the thick film layer.
4 more elements
17-20. (canceled)
Dependencies are inferred from the claim text.