Method of forming a flat media table for probe storage device
AssigneeInternational Business Machines Corporation
InventorsUte Drechsler, Mark A. Lantz, Hugo E. Rothuizen
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AssigneeInternational Business Machines Corporation
InventorsUte Drechsler, Mark A. Lantz, Hugo E. Rothuizen
Estimating the term…
A method of forming a flat media table for a probe-based storage device includes applying a first-photo-resistive coating to one side of a silicon wafer and a second photo-resistive coating to an opposite side of the silicon wafer. The silicon wafer includes a table layer, a suspension layer and a spacer layer sandwiched therebetween. The first photoresistive coating is applied to the table layer and the second photoresistive coating is applied to the suspension layer. A first pattern is formed through photolithography in the second photoresistive coating and etched into the suspension layer. A second pattern is formed through photolithography in the first photoresistive coating and etched into the table layer. A portion of the table layer is released from the suspension layer though selective etching of the spacer layer so as to form a plurality of stand-offs defined by remaining portions of the spacer layer.
A method of forming a flat media table for a probe-based storage device, the method comprising:
Dependencies are inferred from the claim text.