Method and device for the internal plasma treatment of hollow bodies
AssigneeSchott AG
InventorsMatthias Bicker, Robert Hormes, Manfred Lohmeyer
Life of this patent
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Abstract
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.
Claims51
A method for the plasma treatment of at least one workpiece in the form of a hollow body, the method comprising:
- at least partially evacuating a treatment zone in a reactor chamber;
- introducing a process gas into the treatment zone;
- and
- igniting a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone,
- wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment, and wherein the workpiece comprises a first cylindrical or quasi-cylindrical surface and a cylindrical or quasi-cylindrical appendage with a smaller diameter and a shorter length and a second cylindrical or quasi-cylindrical surface, the diameter and the height of the appendage being less than the maximum diameter and the height by at least 20%.
(canceled)
(canceled)
A device for the plasma treatment of at least one workpiece in the form of a hollow body, the device comprising:
- a reactor chamber,
- a treatment zone in the reactor chamber,
- an instrument for at least partially evacuating the treatment zone in the reactor chamber,
- an instrument for injecting electromagnetic energy into the treatment zone in order to generate a plasma and
- an instrument for introducing process gas into the treatment zone,
- wherein the instrument for introducing process gas and the instrument for evacuating the treatment zone are arranged so that the process gas flows through the treatment zone between opposite ends of the zone during operation, and wherein the workpiece comprises a first cylindrical or quasi-cylindrical surface and a cylindrical or quasi-cylindrical appendage with a smaller diameter and a shorter length and a second cylindrical or quasi-cylindrical surface, the diameter and the height of the appendage being less than the maximum diameter and the height by at least 20%.
(canceled)
Dependencies are inferred from the claim text.