Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates
AssigneeOerlikon Trading AG, Truebbach
InventorsJacques Schmitt, Laurent Sansonnens, Mustapha Elyaakoubi, Michael Irzyk
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Abstract
A vacuum vessel and at least two electrodes define an internal process space. At least one power supply is connectable with the electrodes. A substrate holder holds a substrate to be treated in the internal process space. At least one of the electrodes has along a first cross section a concave profile and has along a second cross section a convex profile, the first cross section being parallel to the second cross section. Gas is provided to the space through a gas inlet. Power is provided to the electrodes and the substrate is treated.
Claims14
A vacuum treatment apparatus for treating a substrate, comprising an electrode having a surface with peripheral edges that define a rectangular or square shape when viewed from above, said surface having a generally convex profile along a respective edge cross section taken along each said peripheral edge, which profile gradually changes on approaching the center of said electrode to become a concave profile along a center cross section that is parallel to the respective edge cross section and is taken through the center of said surface.
A vacuum treatment apparatus for treating a substrate, comprising at least two electrodes defining a process space, two of said electrodes each having a first and a second surface, respectively, each with peripheral edges that define a rectangular or square shape when the respective surface is viewed from above, each said surface having a generally convex profile along a respective edge cross section taken along each said peripheral edge of each said surface, which profile gradually changes on approaching the center of each said surface to become a concave profile along a center cross section that is parallel to the respective edge cross section of the respective surface and is taken through the center thereof.
Dependencies are inferred from the claim text.