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US 2009/0155476 A1Published application
Vented Combinatorial Processing Cell
AssigneeIntermolecular, Inc.
InventorsAaron Francis, John Schmidt, Kenneth Alfred Wiliams
Life of this patent
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Abstract
A vented combinatorial processing cell is described, including a sleeve having an end forming a fluid seal with a region of a substrate, a flow head including a vent and disposed in the sleeve to dispense fluid onto the region, the flow head, the substrate, and the sleeve defining a chamber for processing the region, a fluid source attached to the flow head to deliver the fluid into the chamber, and a vacuum port attached to the flow head to remove fluid from the chamber.
Claims24
An apparatus comprising:
- a cell having a fluid seal for defining a region on a substrate;
- a flow head including a vent and disposed in the cell to dispense fluid into the region, the flow head, the substrate, and the cell defining a process chamber;
- a fluid source attached to the flow head to deliver the fluid into the chamber;
- and
- a vacuum port attached to the flow head to remove fluid from the chamber.
2 more elements
An apparatus comprising:
- a plurality of cells defining a plurality of processing regions, each of the plurality of cells comprising at least one vent to a first pressure;
- a plurality of fluid sources attached to at least one of the plurality of cells to deliver fluid to at least one of the plurality of cells at a second pressure;
- and
- a plurality of a vacuum ports attached to at least one of the plurality of cells to remove the fluid from the at least one of the plurality of cells using a third pressure.
1 more element
A method comprising:
- defining multiple regions of a substrate including using a plurality of cells to perform combinatorial processing;
- delivering fluid to the plurality of cells to process the multiple regions in a combinatorial manner including venting the plurality of cells to maintain consistent fluid flow through the plurality of cells;
- and
- removing the fluid from the plurality of cells.
1 more element
Dependencies are inferred from the claim text.