Apparatus for producing a plasma jet
OwnerAndrej Ignatkov, Jens Raackeinventors
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Abstract
The invention relates to an apparatus for producing a plasma jet, having at least one discharge tube through which a process gas flows. According to the invention, electrically conductive discharge protection is provided on at least one discharge tube. The advantages of the invention are, in particular, that parasitic discharges are suppressed, and the thermal loads on the individual components of the apparatus and of the substrate are reduced.
Claims12
An apparatus for producing a plasma jet, the apparatus comprising:
- at least one discharge tube through which a process gas supplied via a gas hose flows and having a wall made of dielectric material,
- a first electrode having a solid configuration and oriented such that it extends centrally inside the discharge tube in the longitudinal direction thereof,
- a second axially extending electrode concentrically surrounding the wall of the discharge tube such that the first electrode, the discharge tube and the second electrode form a coaxial configuration that has a concentric cross-section and an open end at which the plasma jet can be produced, and
- a discharge shield made of electrically conductive material mounted on the discharge tube, the shield being connected to the first electrode such that the discharge shield receives the free end of the gas hose and that the end of the discharge shield facing the free end of the gas hose widens such that the shield surrounds the gas hose while forming a chamber.
The apparatus according to claim wherein the end cap is made of Teflon, another plastic material with corresponding thermal and mechanical stability, or ceramic.
Dependencies are inferred from the claim text.