Ethylene oxide decomposition processing method and decomposition processing device therefor
AssigneeYamaha Corporation
InventorsKUNIMASA MUROI, Jun Yamamoto, Akira Osawa
Life of this patent
Estimating the term…
Abstract
A decomposition processing method for ethylene oxide is provided for when concentration of the ethylene oxide to be decomposed in a gas varies. The method comprises steps of reducing the concentration of ethylene oxide in the gas to a predetermined concentration which is less than the highest concentration of the ethylene oxide in the range of the variation, adsorbing ethylene oxide to a photocatalyst which has ethylene oxide adsorbing ability, and decomposing ethylene oxide by action of one of the photocatalyst and a combination of the photocatalyst and plasma. The adsorbing step and decomposing step are conducted after the reducing step.
Claims6
A decomposition processing device for ethylene oxide in which concentration of the ethylene oxide to be decomposed in a gas varies, wherein the device comprises:
- a buffer part configured to reduce ethylene oxide concentration in a gas to a predetermined concentration which is less than the highest concentration of the ethylene oxide in the range of the variation;
- and
- a decomposition part configured to decompose ethylene oxide in the gas sent from the buffer part,
- wherein the decomposition part comprises a photocatalyst member which has ethylene oxide adsorbing ability and a plasma device.
A decomposition processing device for ethylene oxide in which concentration of the ethylene oxide to be decomposed in a gas varies, wherein the device comprises:
- a buffer part configured to reduce the ethylene oxide concentration in the gas to a predetermined concentration which is less than the highest concentration of the ethylene oxide in the range of the variation;
- and
- a decomposition part configured to decompose ethylene oxide in the gas sent from the buffer part,
- wherein the decomposition part comprises a photocatalyst member which has ethylene oxide adsorbing ability and a plasma device.
Dependencies are inferred from the claim text.