Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus

A method of transferring a substrate from a first substrate holder to a second substrate holder, using a transfer unit, based on transfer data available thereto, the method comprising:

• providing said substrate on said first substrate holder;
• measuring a position error of said substrate;
• calculating positioning adjustment data based on said position error as measured;
• moving said second substrate holder relative to a reference position thereof in accordance with said positioning adjustment data;
• and
• transferring the substrate using said transfer unit from the first substrate holder to the second substrate holder in accordance with said transfer data and placing said substrate on said second substrate holder as moved.

A computer readable medium having computer executable code stored thereon, which, when loaded on a computer assembly, enables the computer assembly to control a method of transferring, using a transfer unit, based on transfer data available thereto, the method comprising:

• providing said substrate on said first substrate holder;
• measuring a position error of said substrate;
• calculating positioning adjustment data based on said position error as measured;
• moving said second substrate holder relative to a reference position thereof in accordance with said positioning adjustment data;
• and
• transferring the substrate using said transfer unit from the first substrate holder to the second substrate holder in accordance with said transfer data and placing said substrate on said second substrate holder as moved.

A transfer system for transferring a substrate on the basis of transfer data available thereto, the transfer system comprising:

• a first substrate holder configured to hold the substrate;
• a position sensor configured to measure a position error of said substrate positioned on said first substrate holder;
• a second substrate holder configured to hold the substrate;
• a transfer unit configured to transfer said substrate from the first substrate holder to the second substrate holder in accordance with said transfer data;
• a processor communicated to said position sensor and configured to calculate positioning adjustment data based on said position error as measured;
• a control unit communicated to said processor and configured to move said second substrate holder relative to a reference position thereof in accordance with said positioning adjustment data as calculated.