Piezoelectric microphone, speaker, microphone-speaker integrated device and manufacturing method thereof
AssigneeElectronics and Telecommunications Research Institute
InventorsHye Jin KIM, Sung Q. Lee, Sang Kyun Lee, Jae Woo Lee, Kang Ho Park, Jong Dae Kim
Life of this patent
Estimating the term…
Abstract
A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series.
Claims18
A piezoelectric microphone comprising:
- a silicon substrate and an insulating layer deposited on the silicon substrate;
- a piezoelectric plate formed on the insulating layer;
- and
- a mating electrode formed on the piezoelectric plate,
- wherein the mating electrode is patterned with a polarity arrayed in series.
A piezoelectric speaker comprising:
- a silicon substrate and an insulating layer deposited on the silicon substrate;
- a piezoelectric plate formed on the insulating layer;
- and
- a mating electrode formed on the piezoelectric plate.
A method of manufacturing a piezoelectric microphone, comprising:
- depositing an insulating layer on a silicon substrate;
- forming a piezoelectric plate on the insulating layer;
- and
- patterning a mating electrode on the piezoelectric plate,
- wherein the mating electrode is formed with a polarity arrayed in series.
A method of manufacturing a piezoelectric speaker, comprising:
- depositing an insulating layer on a silicon substrate;
- forming a piezoelectric plate on the insulating layer;
- and
- patterning a mating electrode on the piezoelectric plate.
Dependencies are inferred from the claim text.