Scanning system for a probe storage device
AssigneeInternational Business Machines Corporation
InventorsMark A. Lantz, Hugo E. Rothuizen
Life of this patent
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AssigneeInternational Business Machines Corporation
InventorsMark A. Lantz, Hugo E. Rothuizen
Estimating the term…
A probe storage device includes a scanner chip body having at least a mechanical ground portion provided with first and second opposing surfaces and a scan table suspension portion. A scan table including a top surface and a back surface is moveably mounted to the scan table suspension portion. A probe array chip is fixedly mounted to the first surface of the mechanical ground portion. A first plate is also fixedly mounted to the first surface of the mechanical ground portion. A second plate, having a main body portion including first and second opposing surfaces, is fixedly mounted to the second surface of the mechanical ground portion. A desiccant layer is positioned upon one of the first surface of the second plate, the back surface of the scan table and one of the first and second surfaces of the mechanical ground portion.
A probe storage device comprising:
Dependencies are inferred from the claim text.