Scanning system for a probe storage device

Abstract

A scanning system includes a base plate, an anchor structure mounted to the base plate, and a first O-topology bracket moveably mounted along a first axis of an X-Y plane to the anchor structure. The first O-topology bracket is resiliently interconnected to the anchor structure by a plurality of parallelization springs. A second O-topology bracket is moveably mounted along a second axis of the X-Y plane to the first O-topology bracket. The second O-topology bracket is resiliently interconnected to the first O-topology bracket through a second plurality of parallelization springs. The first and second O-topology brackets provide a robust, vibration resistant structure that resists both in-plane and out-of-plane deformations to enable sub-nanometer tracking.

Dependencies are inferred from the claim text.