Capacitor and method of manufacturing the same

A capacitor manufacturing method comprising:

• a first step comprising forming a pair of substantially or nearly comb-shaped recess patterns on a first principal surface of a metal base material having a determinable thickness, each of the comb-shaped recess patterns having plural tooth portions and a base portion to which one end sides of the tooth portions are connected, and the comb-shaped recess patterns being arranged alternately and in parallel through the metal base material;
• a second step comprising anodically oxidizing the metal base material to form a dielectric material having plural pores extending from the tooth portions of the recess patterns in the thickness direction of the metal base material;
• a third step comprising opening end portions of the pores formed in the dielectric material at a second principal surface of the dielectric material opposite to the first principal surface, and forming a seed layer covering the openings concerned at the second principal surface of the dielectric material;
• a fourth step comprising forming a substantially or nearly columnar internal electrodes by depositing and filling electrical conductors in the pores using the seed layer;
• and
• a fifth step comprising removing the seed layer, and providing electrical conductors in the pair of recess patterns to form a pair of substantially or nearly comb-shaped surface electrodes so that the plural internal electrodes arranged along the tooth portions of the respective recess patterns are electrically conducted to one another.

A capacitor comprising:

• a dielectric material that is formed of anodic metal oxide and has a determinable thickness, said dielectric material having a pair of substantially or nearly comb-shaped recess patterns on a first principal surface and plural nanoholes extending from the recess patterns in a thickness direction of the dielectric material, each comb-shaped recess pattern being constituted by a base portion and plural tooth portions extending from the base portion, wherein the tooth portions of the pair of comb-shaped recess patterns interlock without touching each other;
• a pair of substantially or nearly comb-shaped surface electrodes that is formed in and along the comb-shaped recess patterns on the first principal surface of the dielectric material, said surface electrodes being insulated from each other;
• and
• plural substantially or nearly columnar internal electrodes filling the nanoholes, wherein one ends of the internal electrodes are connected to respective tooth portions of the pair of surface electrodes and other ends of the internal electrodes opposite to the one ends extend in the thickness direction of the dielectric material.