US 2009/0154015 A1 · MAGNETIC WRITE POLE FABRICATION

Abstract

Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.

Claims20

Dependent claims

A method of fabricating a magnetic write pole, the method comprising:

forming a first mask structure on a magnetic layer, wherein the first mask structure corresponds with a location of a pole tip of the write pole and corresponds with a location of the yoke of the write pole;
performing a removal process around the first mask structure to define the pole tip and part of the yoke;
removing the first mask structure;
forming a second mask structure on a lower portion of the pole tip proximate to an air bearing surface;
expanding an upper portion of the pole tip with magnetic material to increase the width of the upper portion of the pole tip;
and
expanding the part of the yoke with the magnetic material to increase the width of the part of the yoke.

4 more elements

Dependencies are inferred from the claim text.

Magnetic write pole fabrication

Life of this patent

Magnetic write pole fabrication

Life of this patent

Abstract

Claims20