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US 2009/0154009 A1Published application
Methods for fabricating perpendicular recording heads with controlled separation regions
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorQuang Le
Life of this patent
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Abstract
Methods of recording head fabrication are provided to fabricate a region of separation material between a write pole and a shield of a write head that forms a controlled spacing between the write pole and the shield of the write head. The method comprises forming a mask structure having an opening exposing a write pole of the write head and forming separation material above the portions of the write pole exposed by the opening. The method further comprises removing the mask structure and forming a shield of the write head above the separation material. The separation material forms a spacing between the write pole and the shield, which controls the amount of flux from the write pole absorbed by a shield (e.g., a wrap around shield) of the write head.
Claims22
A method for fabricating a write head, the method comprising:
- performing a lithographic process to form a write pole having a pole tip and a yoke intersecting at a flare point;
- forming a first mask structure having a bump opening corresponding with the flare point of the write pole;
- forming separation material in the bump opening of the first mask structure to form a bump;
- removing the first mask structure;
- forming a second mask structure having a shield opening over the pole tip between an air bearing surface and the flare point that at least partially exposes the bump;
- and
- forming shield material in the shield opening over the pole tip and the bump to form a wrap around shield, wherein the bump creates a larger spacing between the wrap around shield and an upper portion of the pole tip proximate to the flare point as compared to the spacing between the wrap around shield and a lower portion of the pole tip proximate to the air bearing surface.
4 more elements
A method for fabricating a write head, the method comprising:
- depositing a layer of write pole material and a layer of etchable material on the write pole material;
- depositing a first mask layer and etching the first mask layer to form a first stencil defining a track width and a flared region of a write pole;
- milling around the first stencil to define the track width and the flared region;
- depositing side gap material and milling the side gap material to form a side gap of the write pole;
- depositing a sacrificial material layer;
- performing a chemical mechanical polishing (CMP) process down to the layer of etchable material which removes the first stencil;
- removing the sacrificial material layer;
- etching to remove the layer of etchable material;
- forming a seed layer structure;
- depositing a second mask layer and performing a photolithographic process on the second mask layer to form a first opening exposing portions of the seed layer structure covering at least a portion of the flared region of the write pole and a portion of a pole tip of the write pole;
- plating exposed portions of the seed layer structure with a separation material;
- removing the second mask layer;
- depositing a cap layer;
- depositing a third mask layer and performing a photolithographic process on the third mask layer to form a second opening defining a wrap around shield;
- and
- plating the wrap around shield in the second opening.
13 more elements
A method for fabricating a write head, the method comprising:
- depositing insulation material, depositing write pole material, depositing a first etchable layer, and depositing a second etchable layer;
- patterning a first mask layer to define a pole tip and a yoke of a write pole with the pole tip and the yoke coupled at a first flare point;
- milling around the first mask layer to define the pole tip and the yoke;
- removing the first mask layer;
- patterning a second mask layer that exposes a portion of the yoke and a portion of the pole tip;
- etching regions exposed by the second mask layer;
- depositing a seed layer;
- removing the second mask layer;
- depositing a first bottom anti-reflective coating (BARC) layer;
- patterning a third mask layer having an opening in the location of the first flare point, wherein the opening in the third mask layer has an edge located between the first flare point and an air bearing surface side of the pole tip that defines a second flare point;
- etching the first BARC layer, and etching exposed portions of the first and second etchable layers;
- plating exposed write pole with a magnetic material;
- depositing a first layer of non-magnetic material over the magnetic material;
- depositing a second layer of non-magnetic material to create a side gap;
- milling to define the walls of the side gap;
- depositing a second BARC layer;
- performing a chemical mechanical polishing (CMP) process to the second etchable layer;
- removing the second BARC layer, and removing the first and second etchable layers;
- depositing a non-magnetic gap layer;
- patterning a fourth mask layer having an opening for a wrap around shield;
- and
- plating a wrap around shield around the fourth mask layer.
19 more elements
A method for fabricating a write head, the method comprising:
- depositing a layer of write pole material and an etchable layer;
- patterning a first mask layer to define a pole tip and a yoke of a write pole with the pole tip and the yoke coupled at a first flare point;
- milling the write pole material around the first mask layer to define the pole tip and the yoke;
- removing the first mask layer;
- depositing a non-magnetic material to create a side gap;
- milling the non-magnetic material on the write pole to define the walls of the side gap;
- etching the etchable layer to expose the write pole;
- patterning a second mask layer that exposes a portion of the yoke and a portion of the pole tip;
- depositing a seed layer;
- removing the second mask layer;
- patterning a third mask layer having an opening in the location of the first flare point, wherein the opening in the third mask layer has an edge located between the first flare point and an air bearing surface side of the pole tip that defines a second flare point;
- etching the side gap material exposed by the opening in the third mask layer to expose the write pole beneath the opening in the third mask layer;
- plating the exposed write pole material with a magnetic material to define the second flare point;
- plating the magnetic material with a first layer of non-magnetic material;
- removing the third mask layer;
- depositing a second layer of non-magnetic material to form a side gap of the write pole;
- patterning a fourth mask layer having an opening for a wrap around shield;
- and
- plating a wrap around shield in the opening of the fourth mask layer.
16 more elements
A method for fabricating a write head, the method comprising:
- depositing a layer of write pole material and an etchable layer;
- patterning a first mask layer to define a pole tip and a yoke of a write pole with the pole tip and the yoke coupled at a first flare point;
- milling the write pole material around the first mask layer to define the pole tip and the yoke;
- removing the first mask layer;
- patterning a second mask layer that exposes a portion of the yoke and a portion of the pole tip;
- depositing a seed layer;
- removing the second mask layer;
- depositing a bottom anti-reflective coating (BARC) layer;
- patterning a third mask layer having an opening in the location of the first flare point, wherein the opening has an edge located between the first flare point and an air bearing surface side of the pole tip that defines a second flare point;
- etching the BARC layer and the etchable layer exposed by the opening in the third mask layer to expose the write pole beneath the opening;
- plating a magnetic material to define the second flare point;
- plating the magnetic material with a first layer of non-magnetic material;
- removing the third mask layer;
- depositing a second layer of non-magnetic material to form a side gap of the write pole;
- milling the non-magnetic material on the write pole to define the walls of the side gap and expose the etchable layer;
- depositing a non-magnetic material to create a side gap;
- milling the non-magnetic material on the write pole to define the walls of the side gap;
- patterning a fourth mask layer having an opening for a wrap around shield;
- and
- plating a wrap around shield in the opening of the fourth mask layer.
17 more elements
A write head, comprising:
- a write pole having a pole tip and a yoke, with the pole tip and the yoke coupled at a first flare point;
- magnetic material deposited on the write pole to define a second flare point;
- a wrap around shield formed proximate to the write pole;
- top gap material separating the trailing edge of the second flare point and the write pole from the wrap around shield;
- and
- side gap material separating the sides of the second flare point and the write pole from the wrap around shield;
- wherein the thickness of the side gap material is greater than the thickness of the top gap material.
4 more elements
Dependencies are inferred from the claim text.