Fiber based mems
AssigneeCornell Research Foundation, Inc.
InventorShahyaan Desai
Life of this patent
Estimating the term…
Abstract
MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak coupling (e.g. base, tip, in-between). Driving mechanisms include base-forcing (magnetics, piezo, electrostatics) or tip forcing (magnetics). Mirrors may be formed on free ends of cantilevers to form optical scanners.
Claims29
A micro-electro-mechanical device scanner comprising:
- a substrate;
- a fiber supported by the substrate at a clamped end of the fiber;
- and
- a mirror supported by a second, free end of the fiber.
A micro-electro-mechanical device scanner comprising:
- a substrate;
- an array of fibers supported by the substrate at a clamped end of the array of fibers;
- and
- a mirror supported by a second, free end of the array of fibers, wherein the fibers cause oscillation of the mirror responsive to selected stimulus.
A micro-electro-mechanical device scanner comprising:
- a substrate;
- a fiber supported by the substrate at a clamped end of the fiber;
- and
- a mirror supported by a second, free end of the fiber, wherein the fiber causes oscillation of the mirror responsive to selected stimulus.
A micro-electro-mechanical device comprising:
- a substrate;
- a fiber supported by the substrate at a clamped end of the fiber;
- and
- a structure supported by a second, free end of the fiber.
A micro-electro-mechanical device comprising:
- a substrate;
- an array of fibers supported by the substrate at a clamped end of the array of fibers;
- and
- a structure supported by a second, free end of the array of fibers, wherein the fibers cause oscillation of the array of fibers and structure responsive to selected stimulus.
A micro-electro-mechanical device comprising:
- a substrate;
- a fiber supported by the substrate at a clamped end of the fiber;
- and
- a structure supported by a second, free end of the fiber, wherein the fiber causes oscillation of the structure responsive to selected stimulus.
Dependencies are inferred from the claim text.