MEMS devices and related scanned beam devices

A MEMS device, comprising:

• a frame;
• a body coupled to and movable relative to the frame;
• drive electronics operable to generate a drive signal that moves the body at an operational frequency, the drive signal including a plurality of drive-signal pulses;
• and
• sensing electronics operable to sense a position of the body only when the drive-signal pulses are not being transmitted by the drive electronics.

A scanned beam imager, comprising:

• at least one light source operable to output a beam;
• a MEMS scanner rotatable about at least one rotation axis, the scanner having a characteristic resonant frequency;
• and
• drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis to scan the beam across a field-of-view (“FOV”), the drive signal having a drive frequency selected to be about equal to the resonant frequency or a sub-harmonic frequency of the resonant frequency;
• and
• at least one light detector operable to convert reflected light from the FOV to electrical signals.

A scanned beam imager, comprising:

• at least one light source operable to output a beam;
• a MEMS scanner positioned to receive the beam;
• drive electronics operable to generate a drive signal that oscillates the MEMS scanner at an operational frequency to scan the beam across a field-of-view (“FOV”), the drive signal including a plurality of drive-signal pulses;
• and
• sensing electronics operable to sense a rotational position of the MEMS scanner only when the drive-signal pulses are not being transmitted;
• and
• at least one light detector operable to convert reflected light from the FOV to electrical signals.

A scanned beam endoscope, comprising:

• a light source operable to provide light;
• an endoscope tip including:
• an illumination optical fiber coupled to the light source;
• a MEMS scanner positioned to receive a beam output from the illumination optical fiber and rotatable about at least one rotation axis, the MEMS scanner having a characteristic resonant frequency;
• and
• at least one light detection element positioned to receive reflected light from the FOV;
• and
• drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis to scan the beam across a field-of-view (“FOV”), the drive signal having a drive frequency selected to be about equal to the resonant frequency or a sub-harmonic frequency of the resonant frequency.

A scanned beam endoscope, comprising:

• a light source operable to provide light;
• an endoscope tip including:
• an illumination optical fiber having an output end and input end coupled to the light source;
• a MEMS scanner positioned to receive the beam;
• and
• at least one light detection element positioned to receive reflected light from the FOV;
• drive electronics operable to generate a drive signal that oscillates the MEMS scanner at an operational frequency to scan the beam across a field-of-view (“FOV”), the drive signal including a plurality of drive-signal pulses;
• and
• sensing electronics operable to sense a position of the MEMS scanner only when the drive-signal pulses are not being transmitted.