Measuring Dimensional Parameters of Structures
OwnerThomas Geiler, Manfred Moertinventors
Life of this patent
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Abstract
Dimensional parameters of structures on a substrate are measured by providing a substrate with a structured surface. The structured surface includes a number of juxtaposed structural elements. A radiation source is configured to emit a beam of radiation having a wavelength in the infrared range. The substrate is illuminated with the beam of radiation. A signal corresponding to a part of the beam of radiation being transmitted through the substrate is detected. Dimensional parameters of the structural elements are calculated based on the transmitted beam signal.
Claims19
A method of measuring dimensional parameters of structures on a substrate, the method comprising:
- providing a substrate with a structured surface, the structured surface comprising a plurality of juxtaposed structural elements;
- providing a radiation source configured to emit a beam of radiation having a wavelength in the infrared range;
- illuminating the substrate with the beam of radiation;
- detecting a signal, the signal corresponding to a part of the beam of radiation being transmitted through the substrate;
- and
- calculating dimensional parameters of the structural elements based on a transmitted beam signal.
A method of measuring dimensional parameters of structures on a substrate, the method comprising:
- providing a substrate with a structured surface, the structured surface comprising a plurality of juxtaposed structural elements;
- providing a scatterometry system, the scatterometry system having a radiation source configured to emit a beam of radiation having a wavelength in the infrared range and a detector configured to detect a signal corresponding to a part of the beam of radiation being transmitted through the substrate;
- transmitting the beam of radiation through the substrate;
- and
- calculating dimensional parameters of the structural elements based on a transmitted beam signal.
A system of measuring dimensional parameters of structures on a substrate, the system comprising:
- a holder for holding a substrate with a structured surface, the structured surface comprising a plurality of juxtaposed structural elements;
- a radiation source configured to emit a beam of radiation having a wavelength in the infrared range and capable to illuminate the substrate with the beam of radiation;
- a detector for detecting a signal, the signal corresponding to a part of the beam of radiation that is transmitted through the substrate;
- and
- a processor for calculating dimensional parameters of the structural elements based on a transmitted beam signal.
A system of measuring dimensional parameters of structures on a substrate, the system comprising:
- means for holding a substrate with a structured surface, the structured surface comprising a plurality of juxtaposed structural elements;
- means for emitting a beam of radiation having a wavelength in the infrared range and capable to illuminate the substrate with the beam of radiation;
- means for detecting a signal, the signal corresponding to a part of the beam of radiation being transmitted through the substrate;
- and
- means for calculating dimensional parameters of the structural elements based on a transmitted beam signal.
A fabrication unit for manufacturing an integrated circuit, the fabrication unit comprising:
- a fabrication tool capable of processing a substrate with a structured surface, the structured surface comprising a plurality of juxtaposed structural elements;
- a scatterometry system, the scatterometry system having a radiation source configured to emit a beam of radiation having a wavelength in the infrared range and a detector configured to detect a signal corresponding to a part of the beam of radiation being transmitted through the substrate;
- and
- a processor for calculating dimensional parameters of the structural elements based on a transmitted beam signal, wherein the fabrication tool is controlled by the calculated dimensional parameters of the structural elements.
Dependencies are inferred from the claim text.