Method and apparatus for measuring 3-dimensional position and orientation of reflective mirror package

An apparatus for measuring a three-dimensional position and an orientation of an object, the apparatus comprising:

• a height measurement unit comprising a first light source and a first image sensor receiving light that is emitted from the first light source to the object and then is reflected from the object, the height measurement unit obtaining height information regarding a height of the object;
• a position measurement unit which comprises a second light source and a second image sensor receiving light that is emitted from the second light source to the object and then is reflected from the object, the position measurement unit obtaining position information regarding a position of the object;
• a tilt angle measurement unit which comprises a third light source and a third image sensor receiving light that is emitted from the third light source to the object and then is reflected from the object, the tilt angle measurement unit obtaining tilt angle information regarding a tilt angle of the object;
• and
• a controlling unit which selectively powers on or off the first, second, and third light sensors, and calculates a height variation, a position variation and tilt angles of the object by using the height information obtained by the height measurement unit, the position information obtained by the position measurement unit, and the tilt angle information obtained by the tilt angle measurement unit,
• wherein optical paths of light in the height measurement unit, the position measurement unit, and the tilt angle measurement unit are along the same optical axis, and the height measurement unit, the position measurement unit, and the tilt angle measurement unit operate independently.