Optical image measurement device
AssigneeKabushi Kaisha Topcon
InventorsKinpui Chan, Masahiro Akiba, Yasufumi Fukuma
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushi Kaisha Topcon
InventorsKinpui Chan, Masahiro Akiba, Yasufumi Fukuma
Estimating the term…
An optical image measurement device comprises: a light source configured to output a light having low temporal coherence and low spatial coherence; an optical system configured to split the light into a signal light and a reference light and superimpose the signal light having passed through a measured object and the reference light, thereby generating an interference light; a light receiver configured to receive the interference light and output an electric signal; and a forming part configured to form an image of the measured object based on the electric signal, wherein: the light receiver has a light receiving face on which a plurality of light receiving elements are arranged 2-dimensionally; and the optical system projects the interference light onto the light receiving face so that a size of the spatial coherent region of the interference light becomes equal to or larger than a size of the light receiving element.
An optical image measurement device comprising:
An optical image measurement device comprising:
Dependencies are inferred from the claim text.