Coordinate measuring machine with temperature adapting station

Abstract

The invention relates to a coordinate measuring machine (1) and a method for adapting the temperature of substrates. The coordinate measuring machine (1) includes at least one measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective (9) and a camera (10) for determining the positions of the structures (3) on the substrate (2). There is further provided an interferometer (24) for determining the positions of the measurement objective (9) and the measurement table (20). The entire system is enclosed by a housing (50) forming a climatic chamber, in which there are further provided a magazine (32) for substrates (2), a loading station (35) for substrates (2) and a transport means (38) transporting the substrates (2) between the loading station (35), the magazine (32) and/or the measurement table (20).

Dependencies are inferred from the claim text.