Liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorKanshi Abe
Life of this patent
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Abstract
A liquid ejecting head includes diffusion layers provided in areas opposing pressure generation chambers by doping impurities into a portion of a channel forming substrate, a detecting portion which detects variations in resistance values of the diffusion layers due to the deformation of vibration plates, and an adjustment portion which adjusts driving voltages applied to pressure generation elements on the basis of the detected result of the detecting portion. Accordingly, it is possible to acquire the displacement amounts of the vibration plates due to the driving of the pressure generation elements, by detecting the variations in resistance values of the diffusion layers due to the deformation of the vibration plates.
Claims8
A liquid ejecting head comprising:
- a channel forming substrate in which pressure generation chambers communicating with nozzles for ejecting liquid droplets are provided;
- vibration plates provided on the channel forming substrate so as to configure one surfaces of the pressure generation chambers;
- pressure generation elements which displace the vibration plates and apply pressure to the insides of the pressure generation chambers;
- diffusion layers provided in areas opposing the pressure generation chambers by doping impurities into a portion of the channel forming substrate;
- a detecting portion which detects variations in resistance values of the diffusion layers due to the deformation of the vibration plates;
- and
- an adjustment portion which adjusts driving voltages applied to the pressure generation elements on the basis of the detected result of the detecting portion.
Dependencies are inferred from the claim text.