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AssigneeRobert Bosch GmbH
InventorsMarkus Lutz, Zhiyu Pan, Aaron Partridge
Estimating the term…
Each one of resonators arranged in an N×M MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections and is mechanically coupled to at least one adjacent resonator of the array via a coupling section, each elongated beam section connected to another elongated beam section at a distal end via the curved/rounded sections forming a geometric shape (e.g., a rounded square), and the coupling sections disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at substantially the same frequency, in combined elongating/breathing and bending modes, i.e., beam sections exhibiting elongating/breathing-like and bending-like motions. One or more of the array structure's resonators may include one or more nodal points (i.e., that are substantially stationary and/or experience little movement), which are suitable and/or preferable locations to anchor the resonator/array to the substrate, in one or more areas of the structure's curved sections.
A MEMS array structure comprising:
A MEMS array structure comprising:
A MEMS array structure comprising:
A MEMS array structure comprising:
A MEMS array structure comprising:
Dependencies are inferred from the claim text.