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US 2009/0153167 A1Published application
Chuck for holding a device under test
AssigneeCascade Microtech, Inc.
InventorsCraig Stewart, Anthony Lord, Jeff Spencer, Terry Burcham, Peter McCann, Rodd Jones, John Dunklee, Tim Lesher, David Newton
Life of this patent
Estimating the term…
Abstract
A chuck includes a conductive element that contacts a device under test in a location on the chuck.
Claims6
A probe station for probing a device under test comprising:
- (a) a chuck having an upper surface suitable to support said device under test;
- (b) a first conductive element defining a first signal path to said upper surface of said chuck, said signal path electrically isolated from said upper surface of said chuck, said conductive element in electrical contact with said device under test when said device under test is at least partially supported by said upper surface of said chuck, said signal path extending through at least a portion of said chuck;
- and
- (c) a second conductive element defining a second signal path, electrically isolated from said first signal path, free of direct electrical contact with said upper surface of said chuck and in electrical contact with said device under test when said device under test is at least partially supported by said upper surface of said chuck, said second signal path not extending through at least a portion of said chuck.
1 more element
A probe station for probing a device under test having a probing surface, said probe station comprising:
- (a) a chuck having an upper surface suitable to support said device under test;
- (b) a first conductive element defining a first signal path to said upper surface of said chuck, said signal path electrically isolated from said upper surface of said chuck, said conductive element in electrical contact with said device under test when said device under test is at least partially supported by said upper surface of said chuck, said signal path extending through at least a portion of said chuck;
- and
- (c) a second conductive element defining a second signal path, electrically isolated from said first signal path, free of direct electrical contact with said upper surface of said chuck and in electrical contact with said device under test when said device under test is at least partially supported by said upper surface of said chuck, said second signal path not extending through at least a portion of said chuck.
1 more element
Dependencies are inferred from the claim text.