Fault detection apparatuses and methods for fault detection of semiconductor processing tools
AssigneeNovellus Systems, Inc.
InventorKeith John HANSEN
Life of this patent
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Abstract
Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool comprises sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
Claims34
A method for detecting a fault of a semiconductor production tool, the method comprising the steps of:
- sensing a signal associated with a test component of the semiconductor production tool during operation of the semiconductor production tool;
- converting the signal to an electronic test signal;
- providing a prerecorded signature signal corresponding to the test component;
- and
- comparing the test signal and the prerecorded signature signal.
A method for detecting a fault of a semiconductor production tool, the method comprising the steps of:
- recording and storing a signature signal corresponding to a test component of the semiconductor production tool;
- mounting at least one detection device so that it is capable of sensing a signal from the test component;
- operating the semiconductor production tool;
- sensing a signal produced by the test component during operation of the semiconductor production tool and converting that signal to a data spectrum;
- comparing the signature signal to the data spectrum;
- and
- producing a fault detection signal based on results of the comparison of the signature signal and the data spectrum.
A fault detection apparatus for a semiconductor production tool, wherein the fault detection apparatus comprises:
- a detection device configured to sense a signal from a test component of the semiconductor production tool and produce a test signal corresponding to the signal;
- a signature signal database that stores a signature signal corresponding to operation of the test component in a known state;
- and
- a comparator in electrical communication with the detection device and the signature signal database, wherein the comparator is configured to compare a test signal received from the detection device and a signature signal received from the signature signal database.
Dependencies are inferred from the claim text.