US 2009/0152999 A1 · PIEZOELECTRIC ACTUATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR

Abstract

In a method for manufacturing a piezoelectric actuator, a ceramic sintered body is prepared and a size of the ceramic sintered body is adjusted in a thickness direction defined below by grinding piezoelectric ceramic layers, included in the ceramic sintered body, located outermost in the thickness direction. In the ceramic sintered body, internal electrodes are each disposed between piezoelectric ceramic layers. The thickness direction is defined as the direction along the thickness of the piezoelectric ceramic layer. Each of the inert sections are disposed on at least one side of the active section, for driving the piezoelectric actuator, in the thickness direction. Dummy internal electrodes are arranged in the inert sections such that each of the dummy internal electrodes are each located between ceramic layers. The thickness of the piezoelectric ceramic layers disposed between the dummy internal electrodes increases with distance from the active section.

Claims8

Dependent claims

A piezoelectric actuator comprising:

a ceramic sintered body comprising:
an active section having a structure that is distorted during operation of the piezoelectric actuator and including piezoelectric ceramic layers and internal electrodes each disposed between adjacent ones of the piezoelectric ceramic layers included in the active section;
and
inert sections including piezoelectric ceramic layers and dummy internal electrodes arranged in a thickness direction, the inert sections having a structure that is not being distorted during operation of the piezoelectric actuator, the thickness direction being defined by a direction along the thickness of the piezoelectric ceramic layers included in the inert sections, each of the inert sections being disposed on at least one side of the active section in the thickness direction, each of the dummy internal electrodes being disposed between adjacent ones of the piezoelectric ceramic layers included in the inert sections;
wherein
a thickness of the piezoelectric ceramic layers included in the inert sections increases with increasing distance from the active section.

3 more elements

Dependencies are inferred from the claim text.

Piezoelectric actuator and method for manufacturing piezoelectric actuator

Life of this patent

Piezoelectric actuator and method for manufacturing piezoelectric actuator

Life of this patent

Abstract

Claims8