Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic device, wave clock, and manufacturing method of piezoelectric vibrating reed

A method of manufacturing a piezoelectric vibrating reed for manufacturing a plurality of piezoelectric vibrating reeds at a time using a wafer made of a piezoelectric material, comprising:

• an outer shape forming step of patterning outer shapes of a plurality of piezoelectric plates on the wafer by etching the wafer using a photolithographic technique;
• an electrode forming step of patterning an electrode film on outer surfaces of a plurality of the piezoelectric plates to form a pair of exciter electrodes configured to vibrate a corresponding piezoelectric plate when a predetermined voltage is applied thereon and a pair of mount electrodes electrically connected to the pair of exciter electrodes, respectively;
• and
• a cutting step of separating a plurality of the piezoelectric plates off from the wafer in the form of small pieces,
• wherein, in the electrode forming step, one mount electrode in the pair of mount electrodes is formed on one surface of the piezoelectric plate and the other mount electrode is formed on the other surface of the piezoelectric plate in a state not to oppose the one mount electrode with the piezoelectric plate in between.