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US 2009/0152654 A1Published application
Micromechanical system
AssigneeRobert Bosch GmbH
InventorsJohannes Classen, Arnd Kaelberer, Patrick Wellner, Dietrich Schubert, Lars Tebje
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Abstract
A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
Claims19
A micromechanical system, comprising:
- a substrate;
- a first planar electrode;
- a second planar electrode positioned movably at a distance above the first planar electrode;
- and
- a third planar electrode positioned at a distance above the second planar electrode.
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A method for producing a micromechanical system, comprising:
- forming a substrate having a first planar electrode;
- forming a first sacrificial layer;
- forming a first functional layer;
- in the first functional layer, patterning a second planar electrode and a suspension;
- forming a second sacrificial layer;
- forming a second functional layer;
- patterning a third planar electrode in the second functional layer;
- selectively removing the first sacrificial layer in a region of a first capacitor gap;
- and
- selectively removing the second sacrificial layer in a region of a second capacitor gap.
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Dependencies are inferred from the claim text.