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US 2009/0152648 A1Published application
Semiconductor Device and Method of Fabricating the Same
OwnerYong Soo Choinventor
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Abstract
Disclosed are a semiconductor device and a method of fabricating the same. The semiconductor device includes a gate electrode that includes a body part disposed on the semiconductor substrate and a projecting part projecting downward from the body part; and source/drain regions at opposite sides of the gate electrode.
Claims20
A semiconductor device comprising:
- a semiconductor substrate;
- a gate electrode comprising a body part on the semiconductor substrate and a projecting part projecting downwardly from the body part;
- and
- source/drain regions in the semiconductor substrate at opposite sides of the gate electrode.
1 more element
A method of fabricating a semiconductor device comprising the steps of:
- forming a groove on a semiconductor substrate;
- forming a gate electrode on the semiconductor substrate, the gate electrode comprising a body part on the semiconductor substrate and a projecting part projecting downwardly from the body into the groove;
- and
- forming source/drain regions in the semiconductor substrate at opposite sides of the gate electrode.
1 more element
Dependencies are inferred from the claim text.