Semiconductor device and manufacturing method of the same
AssigneesSanyo Electric Co., Ltd., Sanyo Semiconductor Co., Ltd.
InventorsShuichi Kikuchi, Kiyofumi Nakaya, Shuji Tanaka
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AssigneesSanyo Electric Co., Ltd., Sanyo Semiconductor Co., Ltd.
InventorsShuichi Kikuchi, Kiyofumi Nakaya, Shuji Tanaka
Estimating the term…
It is desirable to reduce chip area, lower on resistance and improve electric current driving capacity of a DMOS transistor in a semiconductor device with a DMOS transistor. On the surface of an N type epitaxial layer, a P+W layer of the opposite conductivity type (P type) is disposed and a DMOS transistor is formed in the P+W layer. The epitaxial layer and a drain region are insulated by the P+W layer. Therefore, it is possible to form both the DMOS transistor and other device element in a single confined region surrounded by an isolation layer. An N type FN layer is disposed on the surface region of the P+W layer beneath the gate electrode. An N+D layer, which is adjacent to the edge of the gate electrode of the drain layer side, is also formed. P type impurity layers (a P+D layer and a FP layer), which are located below the drain layer, are disposed beneath the contact region of the drain layer.
A semiconductor device comprising:
A method of manufacturing a diffused metal oxide semiconductor transistor, comprising:
Dependencies are inferred from the claim text.