Recessed channel transistor
AssigneeSamsung Electronics Co., Ltd.
InventorsJin-Woo Lee, Tae-Young Chung, Joo-Young Lee
Life of this patent
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Abstract
A recessed channel transistor includes a single crystalline silicon substrate having a recessed portion, a bottom surface of the recessed portion including an elevated central portion, a channel doping region in the single crystalline silicon substrate, the channel doping region being under the bottom surface of the recessed portion, a gate structure in the recessed portion, and source/drain regions in the single crystalline silicon substrate at both sides of the recessed portion, the source/drain regions being spaced apart from the bottom surface of the recessed portion.
Claims12
A recessed channel transistor, comprising:
- a single crystalline silicon substrate having a recessed portion, a bottom surface of the recessed portion including an elevated central portion;
- a channel doping region in the single crystalline silicon substrate, the channel doping region being under the bottom surface of the recessed portion;
- a gate structure in the recessed portion;
- and
- source/drain regions in the single crystalline silicon substrate at both sides of the recessed portion, the source/drain regions being spaced apart from the bottom surface of the recessed portion.
11-19. (canceled)
A semiconductor memory device, comprising:
- a memory cell with at least one recessed channel transistor, the recessed channel transistor including:
- a single crystalline silicon substrate having a recessed portion, a bottom surface of the recessed portion including an elevated central portion;
- a channel doping region in the single crystalline silicon substrate, the channel doping region being under the bottom surface of the recessed portion;
- a gate structure in the recessed portion, and
- source/drain regions in the single crystalline silicon substrate at both sides of the recessed portion, the source/drain regions being spaced apart from the bottom surface of the recessed portion.
Dependencies are inferred from the claim text.