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US 2009/0152619 A1Published application
Semiconductor device and manufacturing method of semiconductor device
AssigneeRenesas Technology Corp.
InventorsDIGH HISAMOTO, Kan Yasui, Shinichiro Kimura, Tetsuya Ishimaru
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Abstract
Provided is a nonvolatile semiconductor memory device having a split gate structure, wherein a memory gate is formed over a convex shaped substrate and side surfaces of it is used as a channel. The nonvolatile semiconductor memory device according to the present invention is excellent in read current driving power even if a memory cell is scaled down.
Claims2
A semiconductor device, comprising:
- a semiconductor substrate;
- a first metal insulator semiconductor field effect transistor formed over the semiconductor substrate;
- a second metal insulator semiconductor field effect transistor formed over the semiconductor substrate and having a second gate electrode formed with an insulating film inserted between the second gate electrode and a first gate electrode of the first metal insulator semiconductor field effect transistor;
- a first diffusion layer electrode;
- a first channel region, corresponding to the first gate electrode, of the first metal insulator semiconductor field effect transistor;
- a second channel region, corresponding to the second gate electrode, of the second metal insulator semiconductor field effect transistor;
- and
- a second diffusion layer electrode opposite to the first diffusion layer electrode with the first channel region and second channel region sandwiched therebetween,
- the first diffusion layer electrode, the first channel region, the second channel region, and the second diffusion layer being in a direction crossing with the respective gate electrodes of the first and second metal insulator semiconductor field effect transistors, wherein:
- a gate insulating film of the second metal insulator semiconductor field effect transistor has a charge retaining function;
- a current flowing between the first diffusion layer electrode and the second diffusion layer electrode is controlled by a change in voltage characteristics caused by the second gate electrode;
- the device has a convex shaped semiconductor region in a direction crossing with a channel direction connecting the first diffusion layer electrode and the second diffusion layer electrode;
- and
- the first channel region of the first metal insulator semiconductor field effect transistor is formed over a side wall of the convex shaped semiconductor region.
11 more elements
2-9. (canceled)
Dependencies are inferred from the claim text.