System and Method for Processing an Object
AssigneeCarl Zeiss NTS GmbH
InventorsWolfram Buhler, Alexander Rosenthal, Emmerich Bertagnolli, Heinz Wanzenbock, Markus Fischer, Gottfried Hochleitner
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Abstract
A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
Claims14
A system for processing an object, the system comprising:
- a particle beam column having an objective lens;
- an object holder for positioning an object to be processed in front of the objective lens;
- and
- a gas supply apparatus having a cannula for supplying gas to the object positioned in front of the objective lens;
- wherein the object holder comprises:
- a base stationary with respect to the particle beam column,
- a first table mounted at the base and translationally displaceable relative to the base in a first direction,
- a second table mounted at the first table and translationally displaceable relative to the first table in a second direction, and
- a third table mounted at the second table and displaceable relative to the second table,
- wherein the cannula is fixed at the first table.
A processing method comprising:
- a positioning a portion of an object in an object field of a particle beam column, wherein an exit opening of a cannula is arranged close to the object field;
- then
- b processing the object by supplying gas via the cannula and activating the gas using the particle beam column;
- then
- c completing the processing the object by moving away the cannula such that its exit opening is arranged spaced apart from the object field of the particle beam column;
- d positioning the portion of the object in the object field of the particle beam column, wherein the exit opening of the cannula is arranged spaced apart from the object field;
- and
- e acquiring a microscopic image of the portion of the object using the particle beam column.
(canceled)
Dependencies are inferred from the claim text.