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US 2009/0152457 A1Published application
Method for Analysis of a Solid Sample
AssigneeION-TOF GmbH
InventorsEwald Niehuis, Reinhard Kersting, Rudolf Möllers, Thomas Grehl
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Abstract
Described is a method for analysis of a solid sample and, in particular, for analysis of the material composition and distribution in or on a solid surface. The surface to be analysed is covered with caesium, at least partially and/or in regions, and the surface is irradiated with an analysis beam which contains predominantly or exclusively polyatomic ions with at least 3 atoms per ion. The secondary ions which are produced are then analysed on caesium compound.
Claims11
1-9. (canceled)
A method for analysis of a solid sample using a secondary ion mass spectroscopy, comprising:
- covering a surface of the sample to be analyzed one of at least partially and in regions with caesium;
- irradiating the surface with an analysis beam to produce secondary ions, the analysis beam one of predominantly and exclusively containing polyatomic ions with at least three atoms per ion;
- and
- analyzing the secondary ions on caesium compounds.
1 more element
Dependencies are inferred from the claim text.