Beam modulating apparatus for mold fabrication by ultra-fast laser technique

Abstract

The present invention relates to a beam modulating apparatus for mold fabrication by ultra-fast laser technique. More particularly, the present invention discloses a beam modulating apparatus for fabricating micro-/nano-scaled structures, which adopts an energy shaping scheme for beam shape modulation while using the modulated beam for mold fabrication. Following the development of flexible electronic devices, such as flexible displays, all kinds of roller molds formed with micro-/nano-scaled structures are becoming the key issue for commercialization and mass production which require a breakthrough in ultra-precision machining and photo-lithography that overcomes the bottlenecks related to shape, size, thermal effect and precision for fabricating sub-micron sized structures and thus greatly enhancing product design capability and functionality. The present invention is capable of modulating pulse shape of an ultra-fast laser beam for making the energy distribution uniform on a mold, that it can be used directly on a curved surface of a metal cylinder since as a cold machining process which utilizes ultra-fast pulsed laser. Moreover, it can be used for forming micro-/nano-scaled structures of any complicated three-dimensional shapes on a mold with line width that is smaller than 10 μm while enabling the mold to be suitable for a roll-to-roll process so as to meet the requirement of cost reduction and value addition.

Dependencies are inferred from the claim text.