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US 2009/0152125 A1Published application
Fluorine separation and generation device
AssigneeThe Regents of the University of California
InventorsCRAIG P. JACOBSON, Steven J. Visco, Lutgard C. DeJonghe, Constantin I. Stefan
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Abstract
A process and apparatus for the electrolytic separation of fluorine from a mixture of gases is disclosed. Also described is the process and apparatus for the generation of fluorine from fluorine/fluoride containing solids, liquids or gases.
Claims10
1-23. (canceled)
A method for removing fluorine from an exhaust gas produced by semiconductor manufacturing, comprising:
- providing a solid electrolyte positioned between an anode electrode and a cathode electrode, each electrode in a separate fluid environment;
- supplying the semiconductor exhaust gas, containing fluorine, to one of the electrodes;
- and
- applying an electric potential between the electrodes;
- wherein fluorine is removed from the semiconductor exhaust gas.
2 more elements
Dependencies are inferred from the claim text.