Target Arrangement
AssigneeGFE Fremat GmbH
InventorsGrit Huttl, Folke Steinert, Joachim Wagner
Life of this patent
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Abstract
The invention relates to a target arrangement comprising a tubular-shaped carrier element and a hollow-cylindrical target having at least one target material, said target comprising at least one one-piece tube segment which at least partially surrounds the carrier element. Said carrier element and the tube segment are partially interconnected in a material fit by at least two plastically deformable compensating means. The invention also relates to a method for producing said type of target arrangement and a tubular segment.
Claims23
1-28. (canceled)
A target arrangement comprising a tubular carrier member (10) and a hollow cylindrical target (20) which comprises at least one target material and which includes at least one tube segment (21) made in one piece and surrounding the carrier member (10) at least section-wise, with the carrier member (10) and the tube segment (21) being partially connected to one another with material continuity by at least two plastically deformable compensation means (24, 30),
- characterized in that mutually spaced apart regions (22) of an intermediate space provided between the target (20) and the carrier member (10) are filled with solder (24).
A method for the manufacturing of a target arrangement comprising a tubular carrier member (10) and a hollow cylindrical target (20) which comprises at least one target material and which includes at least one tube segment (21) made in one piece and surrounding the carrier member (10) at least section-wise, in which method the carrier member (10) and the tube segment (21) are partially connected to one another with material continuity by at least two plastically deformable compensation means (24, 30),
- characterized in that mutually spaced apart regions (22) of an intermediate space provided between the target (20) and the carrier member (10) are filled with solder (24).
A tube segment (21) of a hollow cylindrical target (20), comprising a ceramic material and a metal coating (19), in particular a full area metal coating, at the inner side of the tube segment (21, characterized in that the coating (19) includes a layer sequence of at least two layers (19a, 19c) made of different metal materials, with an outer layer (19c) comprising SnPb.
Dependencies are inferred from the claim text.