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OwnerMarko Eichler, Michael Thomas +1inventors
InventorsMarko Eichler, Michael Thomas, Eugen Schlittenhardt
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The present invention relates to a plasma generating device having a first and a second electrode (3, 4) which are at a spacing from each other for generating a plasma (13) between the two electrodes (3, 4), a dielectric (8) which is disposed between the two electrodes (3, 4), a gas inlet (10) in the space between the two electrodes (3, 4) for supply of a plasma generating gas (12), one of the two electrodes (3, 4) having at least one opening (5) as gas outlet from the space between the two electrodes (3, 4), through which the plasma (13), which can be generated between the two electrodes (3, 4), can be expelled parallel to the direction of the electrical field which can be produced by the two electrodes (3, 4) between the two electrodes (3, 4), a grating, net and/or fabric (1) being disposed across the cross-section of the at least one opening (5).
Plasma generating device having
Plasma generating device according to the preceding claim, characterised in that a grating, net or fabric (1) is disposed across the cross-section of several or all of the openings (5).
Plasma generating device according to the preceding claim, characterised in that the grating, net or fabric (1) is part of the second electrode (4).
Plasma generating method, a plasma being generated between two spaced electrodes by means of barrier discharge and the plasma being expelled via an opening in one of the electrodes from the space between the two electrodes as a plasma beam parallel to the direction of the electrical field produced between the two electrodes, characterised in that
Dependencies are inferred from the claim text.