US 2009/0151871 A1 · SYSTEMS FOR DETECTING UNCONFINED-PLASMA EVENTS

Abstract

A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.

Claims20

Dependent claims

A system for detecting unconfined-plasma events in a plasma processing chamber, the system comprising:

a sensor configured to be disposed in the plasma processing chamber, the sensor configured to provide a current when an unconfined plasma is present in the plasma processing chamber;
a converter configured to convert the current into a voltage;
a filter configured to remove noise from the voltage to provide a first signal;
a detector configured to use an input signal to determine presence of the unconfined plasma, the input signal including at least one of the first signal and an amplified signal of the first signal;
a conductor configured to couple the sensor and the converter, the conductor configured to conduct the current from the sensor to the converter;
and
a shield configured to enclose at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.

4 more elements

A plasma processing system comprising:

a plasma processing chamber;
a capacitive-based sensor configured to be disposed in the plasma processing chamber, the capacitive-based sensor configured to provide a current when an unconfined plasma is present in the plasma processing chamber;
a converter configured to convert the current into a voltage;
a filter configured to remove at least a noise from the voltage to provide a first signal;
a detector configured to use a detector input signal to determine presence of the unconfined plasma, the detector input signal including at least one of the first signal and an amplified level of the first signal;
a conductor configured to couple the sensor and the converter, the conductor configured to conduct the current from the sensor to the converter;
and
a shield configured to enclose at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.

5 more elements

Dependencies are inferred from the claim text.

Systems for detecting unconfined-plasma events

Life of this patent

Systems for detecting unconfined-plasma events

Life of this patent

Abstract

Claims20