Substrate inspection device, substrate inspection method, and recovery tool

A substrate inspection device, for adhering a droplet to a substrate and causing movement in order to inspect the substrate, comprising:

• a substrate rotating device for holding a horizontal substrate and rotating about a rotational center axis oriented vertically;
• a recovery tool having a cylindrical section with a central axis oriented vertically, having an internal space capable of accumulating a droplet, and
• a drive unit capable of moving the recovery tool in a horizontal direction,
• wherein the cylindrical section is provided at a side section with a groove extending horizontally to connect the internal space to atmospheric space, and
• wherein when a droplet is accumulated in the internal space and the substrate is rotated, the drive unit is capable of holding the recovery tool so that a droplet exposed to the groove comes into contact with an edge of the substrate.

A substrate inspection device, for adhering a droplet to a substrate and causing movement in order to inspect the substrate, comprising:

• a substrate rotating device for holding a horizontal substrate and rotating about a rotational center axis oriented vertically;
• a recovery tool having a cylindrical section with a central axis oriented vertically, having an internal space capable of accumulating the droplet;
• a drive mechanism capable of moving the recovery tool in a horizontal direction;
• and
• negative pressure maintaining means capable of maintaining pressure of the internal space at a pressure more negative than atmospheric pressure when liquid has been collected in the internal space,
• wherein the cylindrical section is provided with a first through hole connecting the internal space to atmospheric space at a lower end, and
• wherein when a droplet is accumulated in the internal space and the substrate is rotated, the drive mechanism is capable of holding the recovery tool so that a distance between the surface of the substrate and the lower end of the cylindrical section is kept constant.

A substrate inspection method, for adhering a droplet to a substrate and causing movement in order to inspect the substrate, comprising:

• a substrate inspection device preparation step for preparing a substrate inspection device comprising:
• a substrate rotating device for holding a horizontal substrate and rotating about a rotational center axis oriented vertically;
• a recovery tool having a cylindrical section with a central axis oriented vertically, having an internal space capable of accumulating the droplet;
• a drive mechanism capable of moving the recovery tool in a horizontal direction;
• and
• negative pressure maintaining means capable of maintaining pressure of the internal space at a pressure more negative than atmospheric pressure when liquid has been collected in the internal space,
• wherein the cylindrical section is provided with a first through hole connecting the internal space to atmospheric space at a lower end, and
• wherein when a droplet is accumulated in the internal space and the substrate is rotated, the drive mechanism is capable of holding the recovery tool so that a distance between the surface of the substrate and the lower end of the cylindrical section is kept constant;
• a substrate setting step for setting the substrate in the substrate rotating device;
• a solution dropping step for dropping a solution into the internal space;
• a negative pressure maintaining step where the negative pressure maintaining means maintains pressure in an internal space at a more negative pressure than the atmospheric pressure;
• and
• a substrate scanning step where the drive unit keeps a distance between the surface of the substrate and a lower end of the cylindrical section constant when the substrate is rotated.