Sensing membrane and micro-electro-mechanical system device using the same
AssigneeIndustrial Technology Research Institute
InventorsChia-Yu Wu, Jien-Ming Chen
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Abstract
A sensing membrane applied to a micro-electro-mechanical system (MEMS) device includes a body, a stress releasing structure and a connecting portion. The stress releasing structure for releasing a membrane residual stress surrounds the body. The stress releasing structure has several first perforations and several second perforations. The first perforations are located between the body and the second perforations. The connecting portion connects the stress releasing structure and a substrate of the MEMS device.
Claims37
A sensing membrane, applied to a micro-electro-mechanical system (MEMS) device, comprising:
- a body;
- a stress releasing structure surrounding the body for releasing a membrane residual stress, the stress releasing structure having a plurality of first perforations and a plurality of second perforations, wherein the first perforations are located between the body and the second perforations;
- and
- a connecting portion for connecting the stress releasing structure and a substrate of the MEMS device.
A micro-electro-mechanical system device, comprising:
- a substrate;
- a sensing membrane comprising:
- a body;
- a stress releasing structure surrounding the body for releasing a membrane residual stress, the stress releasing structure having a plurality of first perforations and a plurality of second perforations, wherein the first perforations are located between the body and the second perforations;
- and
- a connecting portion for connecting the stress releasing structure and the substrate;
- and
- a back plate disposed at one side of the sensing membrane in parallel and spaced apart from the sensing membrane by a distance.
Dependencies are inferred from the claim text.