Fluid flow rate measurement apparatus
AssigneeHitachi, Ltd.
InventorsHiroaki Hoshika, Noboru Tokuyasu, Takanori Kokubu, Kaori Kashio
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AssigneeHitachi, Ltd.
InventorsHiroaki Hoshika, Noboru Tokuyasu, Takanori Kokubu, Kaori Kashio
Estimating the term…
Disclosed herein is a fluid flow rate measurement apparatus which prevents accumulation of pollutional substances in a sub-passage to enable high-accuracy fluid flow rate measurement. A heater pattern 34 is formed on the surface of a cylindrical rod 3. When electricity is conducted in the heater pattern 34 and heat is generated, the heat is transmitted to the sub-passage 26 through an insulating layer. The heat is gradually transmitted up to the leading end of the sub-passage 26, and burns out pollutional substances adhering to the sub-passage 26. In this way, accumulation in the sub-passage 26 of pollutional substances can be prevented, thus attaining a fluid flow rate measurement apparatus that enables high-accuracy fluid flow rate measurement.
A fluid flow rate measurement apparatus comprising:
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