Process for obtaining a thin, insulating, soft magnetic film of high magnetization, corresponding film and corresponding integrated circuit
AssigneesSTMicroelectronics S.r.l., Commissariat a L'Energie Atomique Batiment LE PONAND D
InventorsGuillaume Bouche, Pascal Ancey, Bernard Viala, Sandrine Couderc
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Abstract
A thin soft magnetic film combines a high magnetization with an insulating character. The film is formed by nitriding Fe-rich ferromagnetic nanograins immersed in an amorphous substrate. A selective oxidation of the amorphous substrate is then performed. The result is a thin, insulating, soft magnetic film of high magnetization. Many types of integrated circuits can be made which include a component using a membrane incorporating the above-mentioned thin film.
Claims31
A thin, insulating, soft magnetic film of high magnetization, comprising an oxidized amorphous substrate in which nitrided Fe-rich ferromagnetic nanograins are immersed.
An integrated circuit, comprising at least one component using a membrane incorporating a thin, insulating, soft magnetic film of high magnetization, comprising an oxidized amorphous substrate in which nitrided Fe-rich ferromagnetic nanograins are immersed.
A substrate supporting a thin, insulating, soft magnetic film of high magnetization, comprising:
- an amorphous substrate in which nitrided nanograins are immersed;
- and
- a thin film formed from selectively oxidization of only the amorphous substrate.
Dependencies are inferred from the claim text.