Thermal insulation stamper and production method of same

A method of producing a thermal insulation stamper, comprising:

• providing a master plate having a finely patterned surface;
• forming a first metal layer on the patterned surface of the master plate;
• forming a heat insulating layer with a heat-resistant resin over the first metal layer, the heat-resistant resin containing oxygen;
• forming an intermediate layer with a metal over the heat insulating layer;
• forming a conductive coating over the intermediate layer, forming a second metal layer over the conductive coating;
• and
• separating the master plate from the first metal layer, the intermediate layer and the conductive coating being successively vapor-deposited using plasma treatment without exposure to air,
• the plasma treatment forming a region with a high concentration of oxygen in the vicinity of an interface between the heat insulating layer and the intermediate layer.